Optical property evaluation technology for EUV multilayer mirrors

Speaker
Akira Miyake
Affiliation
TOYAMA Company, Kanagawa, Japan
Date
2024-09-16
Time
11:30
Venue
ON-SITE: Seminar Room (Ground Floor), Laboratorio NEST, Pisa ONLINE: https://tinyurl.com/HisatakaTakenakaAkiraMiyake
Host
Stefan Heun